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Page 8 Anti-Reflection Coatings


AR Coatings for excimer lasers

1. ArF laser (193 nm).
2. KrF laser (248 nm).
3. XeCl laser (308 nm).

 


Broadband AR Coatings

4. Visible.
5. Vis-IR region.

 

Page 8 High-Reflection Coatings


HR Coatings for excimer lasers

1. ArF laser (193 nm).
2. KrF laser (248 nm).
3. XeCl laser (308 nm).

 


HR Coatings for Nd: YAG lasers

4. 532 nm.
5. 355 nm.

 

 


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